Scanning Electron Microscope

Model: JEOL JSM-6510

Gun alignment: Electro magnetic

Condenser lens: Electromagnetic 2 stage zoom condenser lens

Objective lens: Super conical type objective lens

Resolution: 3.0 nm (Secondary electron image, at Acc.V. 30 kV W.D. 8 mm)

8.0 nm (Acc. V. 3 KV, WD 6 mm)

15 nm (Acc. V. 1 KV, WD 6 mm)

Accelerating Voltage (Acc.V.): 0.3 to 30 KV (55 steps)

0.3 to 3kV: 100 V steps

3 to 30 kV: 1 kV steps

Image modes: Secondary electron image (Everhart-Thornley detector)

Backscattered electron image

Specimen stage: Eucentric Large-goniometer stage

X: 80 mm

Y: 40 mm

Z (WD): 5 mm to 48 mm

Tilt: -10 degree to +90 degree

Rotation: 360 degree endless

Scanning Mode: Full image (640 x 480 pixels)

Digital image: 640 x 480

Pixels: 1280 x 960 , 2560 x 1920

Exhaust system:

High vacuum mode: DP×1，RP×1

Low vacuum mode: DP×1，RP×2